Possible Design Modification for Capacitive Type MEMS Accelerometer
| المصدر: | المجلة الجامعة |
|---|---|
| الناشر: | جامعة الزاوية - مركز البحوث والدراسات العليا |
| المؤلف الرئيسي: | Sinha, Jyoti K. (Author) |
| مؤلفين آخرين: | Gennish, Ramadan E. (Co-Author) , Albadri, Abdellatef E. (Co-Author) |
| المجلد/العدد: | مج17, ع1 |
| محكمة: | نعم |
| الدولة: |
ليبيا |
| التاريخ الميلادي: |
2015
|
| الشهر: | مارس |
| الصفحات: | 39 - 58 |
| رقم MD: | 1263197 |
| نوع المحتوى: | بحوث ومقالات |
| اللغة: | الإنجليزية |
| قواعد المعلومات: | EduSearch, EcoLink, IslamicInfo, AraBase, HumanIndex |
| مواضيع: | |
| كلمات المؤلف المفتاحية: |
MEMS Accelerometer | Vibration Measurement | Finite Element (Fe) Analysis | Modal Analysis | MEMS Accelerometer Design
|
| رابط المحتوى: |
الناشر لهذه المادة لم يسمح بإتاحتها. |
| المستخلص: |
The use of Micro-Electro Mechanical System (MEMS) concept for manufacturing accelerometers is relatively new technology. However earlier studies suggest that the measured signals by the MEMS accelerometers generally show deviation when compared with the conventional accelerometer. Hence, a simple Finite Element (FE) model of a MEMS accelerometer has been constructed and the modal analysis has been carried out. The cantilever beam mode of finger used in MEMS capacitive type accelerometers observed in the modal analysis highlights the possibility of errors in measurement which is clearly due to non-parallel plates affect. Hence, few modifications in finger design have been suggested to improve the performance of the MEMS accelerometer. The proposed finger shape provided the rigid body motion which is required to give parallel plates during the finger movements and eliminates the nonparallel effect. |
|---|
عناصر مشابهة
-
IMPROVED INERTIAL NAVIGATION SYSTEM USING ALL-ACCELEROMETERS
بواسطة: Al Rawashdeh, Yazan Mohammad منشور: (2014) -
Nonlinear structural behavior of electrically actuated mems actuator
بواسطة: Al Ofi, Abd Alrahman منشور: (2015) -
Review of Performance Evaluation of MEMS Accelerometers in Condition Monitoring
بواسطة: Al Bdri, Abd Ellatef منشور: (2013) -
A Study on How Interaction Design Impinge on Controls Type
بواسطة: Aziz, George Wagih منشور: (2015) -
Applying Bifurcation Theory on the IEEE Second Benchmark Model of Subsynchronous Resonance
بواسطة: Widyan, Mohammed S. منشور: (2002)
