Simulation Of The Location of Beam on The Upper Plane of The Diaphragm For Resonant pressure Sensor
| المصدر: | المجلة الليبية العالمية |
|---|---|
| الناشر: | جامعة بنغازي - كلية التربية بالمرج |
| المؤلف الرئيسي: | Shaglouf, Mohamed Elmahdi (Author) |
| مؤلفين آخرين: | Mousa, Haitham Ramadan (Co-Author) |
| المجلد/العدد: | ع36 |
| محكمة: | نعم |
| الدولة: |
ليبيا |
| التاريخ الميلادي: |
2018
|
| الشهر: | فبراير |
| الصفحات: | 1 - 10 |
| DOI: |
10.37376/1570-000-036-003 |
| ISSN: |
2518-5845 |
| رقم MD: | 1008782 |
| نوع المحتوى: | بحوث ومقالات |
| اللغة: | الإنجليزية |
| قواعد المعلومات: | EduSearch |
| مواضيع: | |
| كلمات المؤلف المفتاحية: |
Microsensor | Beam | E-Type Round Diaphragm | Pressure | Finite-Element Method
|
| رابط المحتوى: |
| المستخلص: |
This paper studies a resonant silicon sensor whose elementary sensing component is the E-type round diaphragm, and the final sensing component is the silicon beam resonator is attached to the E-type round diaphragm. The relationship between the basic natural frequency of the beam resonator and the measured pressure are calculated. As the beam is located at different positions of the upper plane of the E-type diaphragm along its radial direction are simulation, analyzed and investigated. Some important results are obtained. |
|---|---|
| ISSN: |
2518-5845 |
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