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|3 10.37376/1570-000-036-003
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|a eng
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044 |
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|b ليبيا
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100 |
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|9 544602
|a Shaglouf, Mohamed Elmahdi
|e Author
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245 |
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|a Simulation Of The Location of Beam on The Upper Plane of The Diaphragm For Resonant pressure Sensor
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260 |
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|b جامعة بنغازي - كلية التربية بالمرج
|c 2018
|g فبراير
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300 |
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|a 1 - 10
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336 |
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|a بحوث ومقالات
|b Article
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520 |
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|b This paper studies a resonant silicon sensor whose elementary sensing component is the E-type round diaphragm, and the final sensing component is the silicon beam resonator is attached to the E-type round diaphragm. The relationship between the basic natural frequency of the beam resonator and the measured pressure are calculated. As the beam is located at different positions of the upper plane of the E-type diaphragm along its radial direction are simulation, analyzed and investigated. Some important results are obtained.
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653 |
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|a الهندسة الإلكترونية
|a الرنين المغناطيسي
|a مجسات السيلكون الرنانة
|a تكنولوجيا الاستشعار
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692 |
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|b Microsensor
|b Beam
|b E-Type Round Diaphragm
|b Pressure
|b Finite-Element Method
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773 |
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|4 العلوم الإنسانية ، متعددة التخصصات
|4 العلوم الاجتماعية ، متعددة التخصصات
|6 Humanities, Multidisciplinary
|6 Social Sciences, Interdisciplinary
|c 003
|e Global Libyan Journal
|f Al-Mağallaẗ al-libiyyaẗ al-ʿalāmiyyaẗ
|l 036
|m ع36
|o 1570
|s المجلة الليبية العالمية
|v 000
|x 2518-5845
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700 |
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|9 544603
|a Mousa, Haitham Ramadan
|e Co-Author
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856 |
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|u 1570-000-036-003.pdf
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930 |
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|d y
|p y
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995 |
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|a EduSearch
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999 |
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|c 1008782
|d 1008782
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